1000 KB10 KB198520251994Bizjak, M.Koller, LidijaSpruk, Sonjaštevilka:1letnik:24str. 38-42ISSN:0352-9045COBISSID:17047301URN:URN:NBN:SI:doc-9E6CXGXUenStrokovno društvo za mikroelektroniko, elektronske sestavne dele in materialeInformacije MIDEMElectronikaelektronikakontaktna upornostlastnostimaterialirelejisestavni deliCharacterisation of outgassing contact materials for miniature relays|Systematic investigations of vacuum outgassing for hermetic relays with AgCdO/AGPHOR and PdAg3O Au electroplated contacts were done. The experimental vacuum system constructed and built at our institute was additionally equiped with quadrupole mass spectrometer for residual gas analysis. Prior to the final encapsulation the relays were baked at the constant temperature of 125°C and outgassed in vacuum 1X10sup-5 mbar for several hours. The residual atmosphere was analysed every hour; in residual gas mixture, hydrogen, carbon monoxide, carbon dioxide, water vapour and remanents of cleaning chemical agents (ethanol, trichlorethylene) and hydrocarbons were found. Residual gas analysis showed that the concentration of impurity gases depends on materials and their treatments in different technological phasesSistematično smo raziskovali hermetične releje z AgCdO (AGPHOR lot folija) in PdAg30 elektrokemijsko pozlačenimi kontakti. Eksperimentalni vakuumski sistem, ki smo ga uporabljali, je bil konstruiran in narejen na našem inštitutu. Dodatno smo ga opremili s kvadrupolnim masnim spektrometrom za analizo preostale atmosfere v relejih. Pred dokončno inkapsulacijo smo preiskovane releje razplinjevali nekaj ur pri konstantni temperaturi 125°C v vakuumu 1X10zgoraj-5 mbar. Vsako uro smo analizirali atmosfero v relejih. V izmerjeni mečanici plinov smo odkrili vodik, ogljikov monoksid, ogljikov dioksid, vodno paro, ostanke kemijskih čistil (etanola in trikloretilena) in klorovodike. Analiza je pokazala, da je koncentracija plinskih nečistoč odvisna od materialov samih, pa tudi od njihove obdelave v različnih tehnoloških postopkihTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaStrokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale