25 KB261 KB24 KB200020242004Bunning, Timothy J.Eyink, K.Fleitz, P.Grant, John T.Jiang, H.Johnson, E.M.Johnson, W.E.O'Neill, K.Tomlin, D.W.Tullis, S.številka:1/2letnik:386 stranistr. 3-8ISSN:1580-2949COBISSID:339114URN:URN:NBN:SI:doc-894OIBX1enInštitut za kovinske materiale in tehnologijeMateriali in tehnologijekarakterizacija materialovpolimeritanke plastiThe characterization of polymer thin films grown by plasma polymerization|Plasma-enhanced chemical vapor deposition (PECVD) has been used to groww homo- polymerized films, co-polymerized films, and multi-layered films on a variety of substrates. The use of polymers as linear optical materials has growing, and organic materials offer several advantages over inorganic materials. These advantages include processability and cost. Optical polymers have refractive indices in a narrow range between 1.4 and 1.6 and for multi-layer interference films the thickness needs to be in the range of 75-100 nm. In this work, benzene and octafluorocyclobutane (OFCB) have been used as precursor materials and are reacted either downstream from the plasma or, in some cases with OFCB, in the plasma zone itself. Rates of deposition and refractive indices were measured and this information was used to design and fabricate photonic structures. The films were characterized using scanning electron microscopy (SEM), Fourier transform infrared spectroscopy (FTIR), variable-angle spectroscopic ellipsometry (VASE), and X-ray photoelectron spectroscopy (XPS/ESCA)Kemijski nanos iz pare s plazmo (PECVD) je bil uporabljen za pripravo homopolimeriziranih, kopolimeriziranih in večplastnih tankih plasti na različnih podlagah. Uporaba polimerov kot linearnih optičnih materialov raste, ker imajo organski materiali več prednosti pred anorganskimi materiali. Med prednostmi so tudi procesiranje in stroški. Optični polimeri imajo lomne količnike v ozkem pasu med 1,4 in 1,6 in za večplastno interferenco je ppotrebna debelina plasti med 75 nm in 100 nm. V tem delu sta kot prekurzorja uporabljena benzen in oktafluorciklobutan (OFCB), ki sta bila zreagirana protitočno iz plazemske cone in v nekaterih primerih iz OFCB plazemske cone. Hitrosti nanašanja in lomni količnik so bili izmerjeni in podatek je uporabljen za načrtovanje in izdelavo fotonskih struktur. Karakterizacija plasti je bila izvršena z vrstično elektronsko mikroskopijo (SEM), Fourier transformacijsko infrardečo spektroskopijo (FTIR), večkotno spektroskopsko elipsometrijo (VASE) in rentgensko fotoelektronsko spektroskopijo (XPS)TEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaInštitut za kovinske materiale in tehnologije