<?xml version="1.0"?><rdf:RDF xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:edm="http://www.europeana.eu/schemas/edm/" xmlns:wgs84_pos="http://www.w3.org/2003/01/geo/wgs84_pos" xmlns:foaf="http://xmlns.com/foaf/0.1/" xmlns:rdaGr2="http://rdvocab.info/ElementsGr2" xmlns:oai="http://www.openarchives.org/OAI/2.0/" xmlns:owl="http://www.w3.org/2002/07/owl#" xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:ore="http://www.openarchives.org/ore/terms/" xmlns:skos="http://www.w3.org/2004/02/skos/core#" xmlns:dcterms="http://purl.org/dc/terms/"><edm:WebResource rdf:about="http://www.dlib.si/stream/URN:NBN:SI:DOC-720D5B1G/ed37323d-a907-4888-9d8c-8056b2e66dfb/PDF"><dcterms:extent>629 KB</dcterms:extent></edm:WebResource><edm:WebResource rdf:about="http://www.dlib.si/stream/URN:NBN:SI:DOC-720D5B1G/ef061742-1057-4b1f-9b61-e3c1063b66da/TEXT"><dcterms:extent>19 KB</dcterms:extent></edm:WebResource><edm:TimeSpan rdf:about="1985-2025"><edm:begin xml:lang="en">1985</edm:begin><edm:end xml:lang="en">2025</edm:end></edm:TimeSpan><edm:ProvidedCHO rdf:about="URN:NBN:SI:DOC-720D5B1G"><dcterms:isPartOf rdf:resource="https://www.dlib.si/details/URN:NBN:SI:spr-Z2J12Z6C" /><dcterms:issued>2008</dcterms:issued><dc:creator>Arnoult, G.</dc:creator><dc:creator>Belmonte, Thierry</dc:creator><dc:creator>Cardoso, R. P.</dc:creator><dc:creator>Henrion, G.</dc:creator><dc:creator>Kosior, F.</dc:creator><dc:creator>Noël, C.</dc:creator><dc:format xml:lang="sl">letnik:38</dc:format><dc:format xml:lang="sl">številka:4</dc:format><dc:format xml:lang="sl">str. 272-276</dc:format><dc:identifier>ISSN:0352-9045</dc:identifier><dc:identifier>COBISSID:7569748</dc:identifier><dc:identifier>URN:URN:NBN:SI:doc-720D5B1G</dc:identifier><dc:language>en</dc:language><dc:publisher xml:lang="sl">Strokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale</dc:publisher><dcterms:isPartOf xml:lang="sl">Informacije MIDEM</dcterms:isPartOf><dc:subject xml:lang="sl">argon</dc:subject><dc:subject xml:lang="sl">kisik</dc:subject><dc:subject xml:lang="sl">mikrovalovna plazma</dc:subject><dc:subject xml:lang="sl">površinska obdelava</dc:subject><dc:subject xml:lang="sl">tlak</dc:subject><dcterms:temporal rdf:resource="1985-2025" /><dc:title xml:lang="sl">Microwave plasmas at atmospheric pressure| Mikrovalovna plazma pri atmosferskem tlaku| new theoretical developments and applications in surface science| sodobni teoretični pristopi in uporaba za modifikacijo površin|</dc:title><edm:type>TEXT</edm:type><dc:type xml:lang="sl">znanstveno časopisje</dc:type><dc:type xml:lang="en">journals</dc:type><dc:type rdf:resource="http://www.wikidata.org/entity/Q361785" /></edm:ProvidedCHO><ore:Aggregation rdf:about="http://www.dlib.si/?URN=URN:NBN:SI:DOC-720D5B1G"><edm:aggregatedCHO rdf:resource="URN:NBN:SI:DOC-720D5B1G" /><edm:isShownBy rdf:resource="http://www.dlib.si/stream/URN:NBN:SI:DOC-720D5B1G/ed37323d-a907-4888-9d8c-8056b2e66dfb/PDF" /><edm:rights rdf:resource="http://rightsstatements.org/vocab/InC/1.0/" /><edm:provider>Slovenian National E-content Aggregator</edm:provider><edm:intermediateProvider xml:lang="en">National and University Library of Slovenia</edm:intermediateProvider><edm:dataProvider xml:lang="sl">Strokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale</edm:dataProvider><edm:object rdf:resource="http://www.dlib.si/streamdb/URN:NBN:SI:DOC-720D5B1G/maxi/edm" /><edm:isShownAt rdf:resource="http://www.dlib.si/details/URN:NBN:SI:DOC-720D5B1G" /></ore:Aggregation></rdf:RDF>