{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-4D5OPSIO/b8f1db1e-ab0d-4331-85bc-24403e0e9971/PDF","dcterms:extent":"1430 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-4D5OPSIO/f1b919b6-144d-4aea-bd4f-ff27f6fa1215/TEXT","dcterms:extent":"30 KB"}],"edm:TimeSpan":{"@rdf:about":"1999-2025","edm:begin":{"@xml:lang":"en","#text":"1999"},"edm:end":{"@xml:lang":"en","#text":"2025"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-4D5OPSIO","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-6QOUKQ9A"},{"@xml:lang":"sl","#text":"Strojniški vestnik"}],"dcterms:issued":"2014","dc:creator":["Abbasi, Mohammad","Mohammadi, Ardeshir Karami"],"dc:format":[{"@xml:lang":"sl","#text":"številka:3"},{"@xml:lang":"sl","#text":"letnik:60"},{"@xml:lang":"sl","#text":"str. 179-186, SI 34"}],"dc:identifier":["ISSN:0039-2480","COBISSID:13403931","URN:URN:NBN:SI:doc-4D5OPSIO"],"dc:language":"en","dc:publisher":{"@xml:lang":"sl","#text":"Zveza strojnih inženirjev in tehnikov Slovenije et al."},"dc:subject":[{"@xml:lang":"sl","#text":"mikroskop na atomsko silo"},{"@xml:lang":"sl","#text":"nelokalna teorija elastičnosti"},{"@xml:lang":"sl","#text":"odvisnost od velikosti"},{"@xml:lang":"sl","#text":"sestavljeno tipalo na ročico"}],"dcterms:temporal":{"@rdf:resource":"1999-2025"},"dc:title":{"@xml:lang":"sl","#text":"A detailed analysis of the resonant frequency and sensitivity of flexural modes of atomic force microscope cantilevers with a sidewall probe based on a nonlocal elasticity theory|"},"dc:description":[{"@xml:lang":"sl","#text":"In this paper, utilizing a nonlocal elasticity theory, the resonant frequency and sensitivities of an atomic force microscope (AFM) with an assembled cantilever probe (ACP) are studied. This ACP comprises a horizontal cantilever and a vertical extension, and a tip located at the free end of the extension, which makes the AFM capable of topography at the sidewalls of microstructures. First, the governing differential equations of motion and boundary conditions for flexural vibration are obtained via a combination of the basic equations of nonlocal elasticity theory and Hamilton's principle. Afterwards, a closed-form expression for the sensitivity of vibration modes is obtained using the relationship between the resonant frequency and contact stiffness between tip and sample. This analysis provide a better representation of the vibration behaviour of an AFM cantilever with a sidewall probe, for which the effects of the small scale are significant. The results of the nonlocal theory are compared to those of classic beam theory. The evaluation shows that the resonant frequency and sensitivity of the proposed ACP are size dependent, especially when the contact stiffness are high"},{"@xml:lang":"sl","#text":"Mikroskopi na atomsko silo (AFM) imajo sestavljena tipala na ročico (ACP), katerih debelina je velikostnega reda nekaj mikronov ali manj kot mikron, zato je za preučitev njihovega od velikosti odvisnega dinamičnega vedenja nujna uporaba neklasičnih teorij nosilcev, kot je npr. nelokalna teorija elastičnosti. V članku sta preučeni resonančna frekvenca in občutljivost mikroskopa na atomsko silo s sestavljenim tipalom na ročico s pomočjo nelokalne teorije elastičnosti. ACP je sestavljen iz vodoravne ročice z navpičnim podaljškom. Konica je nameščena na prostem koncu podaljška, zato lahko AFM meri topografijo stranskih sten mikrokonstrukcij. Najprej so bile s kombinacijo osnovnih enačb nelokalne teorije elastičnosti in Hamiltonovega načela določene vodilne diferencialne enačbe gibanja in robni pogoji za upogibne vibracije"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-4D5OPSIO","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-4D5OPSIO"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-4D5OPSIO/b8f1db1e-ab0d-4331-85bc-24403e0e9971/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Univerza v Ljubljani, Fakulteta za strojništvo"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-4D5OPSIO/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-4D5OPSIO"}}}}