{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-2H7FNV99/7a56bf9a-8422-4c33-a475-3de029a2541f/HTML","dcterms:extent":"16 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-2H7FNV99/12858d91-b17d-4bbf-bd69-1da94fa7917c/PDF","dcterms:extent":"596 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-2H7FNV99/a947ff7a-44cb-4141-9446-5d3db43c1b6f/TEXT","dcterms:extent":"15 KB"}],"edm:TimeSpan":{"@rdf:about":"1992-1999","edm:begin":{"@xml:lang":"en","#text":"1992"},"edm:end":{"@xml:lang":"en","#text":"1999"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-2H7FNV99","edm:isNextInSequence":{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:doc-S1J4SYBY"},"dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-QKUCN2BD"},{"@xml:lang":"sl","#text":"Kovine zlitine tehnologije"}],"dcterms:issued":"1995","dc:creator":["Budnar, Miloš","Cvelbar, Andrej","Dražić, Goran","Navinšek, Boris","Panjan, Peter","Pelicon, Primož","Remškar, Maja","Zalar, Anton","Zorko, Benjamin"],"dc:format":[{"@xml:lang":"sl","#text":"številka:1/2"},{"@xml:lang":"sl","#text":"letnik:29"},{"@xml:lang":"sl","#text":"4 strani"},{"@xml:lang":"sl","#text":"str. 309-312"}],"dc:identifier":["COBISSID:12514","ISSN:1318-0010","URN:URN:NBN:SI:doc-2H7FNV99"],"dc:language":"sl","dc:publisher":[{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},{"@xml:lang":"sl","#text":"Železarna Jesenice"},{"@xml:lang":"sl","#text":"Železarna Ravne"},{"@xml:lang":"sl","#text":"Železarna Štore"}],"dc:subject":[{"@xml:lang":"sl","#text":"fizika trdne snovi"},{"@xml:lang":"sl","#text":"reakcije"},{"@xml:lang":"sl","#text":"tanke plasti"},{"@xml:lang":"sl","#text":"večplastne strukture"}],"dcterms:temporal":{"@rdf:resource":"1992-1999"},"dc:title":{"@xml:lang":"sl","#text":"Študij reakcij v večplastnih strukturah|"},"dc:description":[{"@xml:lang":"sl","#text":"The results of investigation of Ni/Si, Ti/Si, Ni/Al, Mo/Si and Cr/Si, prepared by sputter deposition, were presented. Silicon wafer (100) and polished ceramics (?$R_a$? = 25 nm) were used as substrates. The samples were heated up in a tube furnace with an argon gas flow up to the temperature of 750°C. By means of X-ray diffraction (XRD), Rutherford backscattering spectroscopy (RBS), Auger electron spectroscopy (AES), cross-sectional transmission electron microscopy (XTEM) and in-situ electrical resistivity, the kinetics of phases formation were determined"},{"@xml:lang":"sl","#text":"V prispevku so predstavljeni rezultati meritev na večplastnih strukturah Ni/Si,Ti/Si, Mo/Si in Ni/Cr/Si, ki smo jih pripravili z naprševanjem. Za podlage smo uporabili silicijeve rezine (100) in visoko polirano keramiko. Vzorce smo segrevali v cevni peči, v inertni atmosferi od sobne temperature do 750°C. Kinetiko rasti posameznih faz na mejah tankih plasti smo med samim segrevanjem zasledovali (in situ) z merjenjem električne upornosti, po segrevanju na izbrano temperaturo, pa smo vzorce analizirali z Augerjevo elektronsko spektroskopijo (AES), rentgenskim uklonom (XRD), Rutherfordovo spektroskopijo povratno sipanih ionov (RBS) in presevno elektronsko mikroskopijo (XTEM)"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-2H7FNV99","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-2H7FNV99"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-2H7FNV99/12858d91-b17d-4bbf-bd69-1da94fa7917c/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-2H7FNV99/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-2H7FNV99"}}}}