15 KB116 KB14 KB199219991998Cvelbar, FrancČekada, MihaNavinšek, BorisPanjan, Peterletnik:32številka:6str. 545-548ISSN:1318-0010COBISSID:94634URN:URN:NBN:SI:doc-29L10TCWenInštitut za kovinske materiale in tehnologijeŽelezarna JeseniceŽelezarna RavneŽelezarna ŠtoreKovine zlitine tehnologijeKbk wz. 1988 Tantalkromnitridioksidacijatantalzaščitne prevlekeCharacterization of hard protective coatings based on (Cr,Ta)N| Karakterizacija trdih zaščitnih prevlek na osnovi (Cr,Ta)N|By reactive sputtering at low temperataures (200°C) harad coatings (Cr,Ta)N with two different compositions: ?$Cr_{0,58}Ta_{0,42}N$? and ?$Cr_{0,17}Ta_{0,83}N$? were prepared. Basic mechanical properties were evaluated such as Vickers microhardness, adhesion and internal stress in the coating. Among electrical properties, electrical resistivity and thermal coefficient of resistivity were measured. Crystal structure was also determined. All measurements were compared with results, obtained for chromium nitrideand tantalum nitride coatings, prepared at the same apparatus at similar conditions. Oxidation rate of the coatings was also measured. At temperatures above 800°C a protective layer of chromium oxide was detected which stops further oxidation. At lower temperatures on the other hand, no such layer forms and oxidation proceeds unrestrainedZ reaktivnim naprševanjem smo pri nizkih temperaturah (200°C) pripravili trdi zaščitni prevleki (Cr,Ta)N z dvema različnima sestavama: ?$Cr_{0,58}Ta_{0,42}N$? in ?$Cr_{0,17}Ta_{0,83}N$?. Izmerili smo osnovne mehanske lastnosti (mikrotrdoto po metodi Vickers, adhezijo in notranje napetosti v plasti), električne lastnosti (specifično električno upornost in temperaturni koeficient upornosti) ter določili kristalno strukturo. Rezultate meritev za obe tenarni nitridni prevleki smo primerjali s tistimi za prevleki iz kromovega nitrida in tantalovega nitrida, pripravljeni v isti napravi pri podobnih pogojih. Merili smo tudi oksidacijsko odpornost prevlek. S fizikalnega stališča je zanimivo oksidacijsko obnašanje ?$Cr_{0,58}Ta_{0,42}N$?. Pri temperaturah nad 800°C smo opazili zaščitno plast kromovega oksida, ki prepreči nadaljno oksidacijo. Pri nižjih temperaturah ta plast ne nastane in oksidacija poteka neoviranoNadaljuje se kot: Materiali in tehnologijeTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaInštitut za kovinske materiale in tehnologije