URN:NBN:SI:DOC-0L02J85I1994Runovc, Francdocuments/znanstveni_clanki/kovine_zlitine_tehnologije/html/URN_NBN_SI_doc-0L02J85I.htmldocuments/znanstveni_clanki/kovine_zlitine_tehnologije/pdf/URN_NBN_SI_doc-0L02J85I.pdfdocuments/znanstveni_clanki/kovine_zlitine_tehnologije/txt/URN_NBN_SI_doc-0L02J85I.txt2834 straniarticlestr. 512-5151318-001070182656URN:NBN:SI:doc-0L02J85IengInštitut za kovinske materiale in tehnologijeŽelezarna JeseniceŽelezarna RavneŽelezarna ŠtoreKovine zlitine tehnologijeInCMetallurgical and Materials Engineeringmetalurgijamikroelektronikamodeliranje procesovsimulacijaComputer-aided modeling and simulation of fabrication steps in semiconductor processes